How lasers and optics help increase semiconductor manufacturing yield

Stan Stokowski; Mehdi Vaez-Iravani

Conference on Lasers and Electro-Optics
(Optica Publishing Group, 1998),
paper LThA4

How lasers and optics help increase semiconductor manufacturing yield

Stan Stokowski and Mehdi Vaez-Iravani

Conference on Lasers and Electro-Optics 1998

San Francisco, California United States
3–8 May 1998
ISBN: 1-55752-540-4

From the session
Optics in Semiconductor Manufacturing: I (LThA)

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S. Stokowski and M. Vaez-Iravani, "How lasers and optics help increase semiconductor manufacturing yield," in Conference on Lasers and Electro-Optics, D. Scifres and A. Weiner, eds., (Optica Publishing Group, 1998), paper LThA4.

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Abstract

Wafer inspection tools help to increase and maintain semiconductor manufacturing yields. These tools are now an integral part of manufacturing process control.

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