Semiconductor material process with UV laser irradiation

Cheng-Yen Chen; Chung-Yen Chao; Zong-Kwei Wu; Chee-Wee Liu; C.C. Yang; Yih Chang; Yih Chang

Conference on Lasers and Electro-Optics
(Optica Publishing Group, 1998),
paper CTuM34

Semiconductor material process with UV laser irradiation

Cheng-Yen Chen, Chung-Yen Chao, Zong-Kwei Wu, Chee-Wee Liu, C.C. Yang, and Yih Chang

Conference on Lasers and Electro-Optics 1998

San Francisco, California United States
3–8 May 1998
ISBN: 1-55752-540-4

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CLEO Poster Session: I (CTuM)

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C. Chen, C. Chao, Z. Wu, C. Liu, C. C. Yang, and Y. Chang, "Semiconductor material process with UV laser irradiation," in Conference on Lasers and Electro-Optics, D. Scifres and A. Weiner, eds., (Optica Publishing Group, 1998), paper CTuM34.

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Abstract

In this paper, we present our results of using UV laser for processing silicon and GaAs. The laser source is the fourth harmonic (266 nm) of a Q-switched Nd:YAG laser.

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