Micromachining with femtosecond lasers

S. Nolte; C. Momma; G. Kamlage; B.N. Chichkov; A. Tünnermann; F. von Alvensleben; H. Welling

Conference on Lasers and Electro-Optics
(Optica Publishing Group, 1998),
paper CFD3

Micromachining with femtosecond lasers

S. Nolte, C. Momma, G. Kamlage, B.N. Chichkov, A. Tünnermann, F. von Alvensleben, and H. Welling

Conference on Lasers and Electro-Optics 1998

San Francisco, California United States
3–8 May 1998
ISBN: 1-55752-540-4

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Femtosecond Microstructuring (CFD)

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S. Nolte, C. Momma, G. Kamlage, B. N. Chichkov, A. Tünnermann, F. von Alvensleben, and H. Welling, "Micromachining with femtosecond lasers," in Conference on Lasers and Electro-Optics, D. Scifres and A. Weiner, eds., (Optica Publishing Group, 1998), paper CFD3.

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Abstract

In the near future, the application of ultrashort-pulse lasers for the production of microparts and microstructures will become an established industrial technique.

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