Abstract
Since Barbee demonstrated successfully normal-incidence soft-X-ray reflectors with high reflectances over 50% at 13.8 nm by means of 50-layer Mo/Si multilayers deposited by a magnetron sputtering,1 there have been various fabrication studies on soil-X-ray multilayer reflectors with use of electron beam evaporation, and ion beam, RF, and DC magnetron sputtering depositions.
© 1997 Optical Society of America
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