Two-photon optical beam induced current (OBIC) imaging through the backside of integrated circuits

Chris Xu; Winfried Denk

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1997),
paper CPD2

Two-photon optical beam induced current (OBIC) imaging through the backside of integrated circuits

Chris Xu and Winfried Denk

Conference on Lasers and Electro-Optics 1997

Baltimore, Maryland United States
18–23 May 1997
ISBN: 1-55752-498-8

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C. Xu and W. Denk, "Two-photon optical beam induced current (OBIC) imaging through the backside of integrated circuits," in Conference on Lasers and Electro-Optics, D. Killinger, G. Valley, C. Chang-Hasnain, and W. Knox, eds., Vol. 11 of OSA Technical Digest (Optica Publishing Group, 1997), paper CPD2.

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Abstract

Circuit features were imaged with high resolution by raster scanning using femtosecond pulses at 1.5 μm focused through the polished circuit rear face. Applications in IC failure analysis are envisioned.

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