Abstract

The improvement of the laser radiation resistivity of optical coatings is an essential premise for the further development of optical components used in high-power laser physics. The improved deposition techniques cause a changing in the damage origins of the multilayer systems. While precedingly the density and distribution of the inclusions (defects) during the deposition technique determine the damage behavior, now, processes within the homogeneous-layer structure have to be taken into consideration.

© 1996 Optical Society of America