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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1995),
  • paper CWL1

High-precision Si-micromachined micromirrors with on-chip actuation for external-cavity semiconductor lasers

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Abstract

External-cavity semiconductor lasers are of interest for applications such as laser-linewidth narrowing, emission wavelength tuning, and laser mode locking. One drawback of existing external-cavity lasers is the difficulty in maintaining mechanical stability for critical alignment of the bulk optical elements. Meanwhile, schemes schemes employing optical fibers as the external cavities offer no flexibility in varying the cavity length once the device is built. We demonstrate a silicon-micromachined on-chip actuated micromirror that can be used to construct robust, yet adjustable, external-cavity laser systems.

© 1995 Optical Society of America

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