Abstract
Excimer-laser ablation offers unique advantages over other methods in the growth of multicomponent films. However, the fabrication of optical elements such as waveguides by this technique has been hindered by the micrometer and submicrometer particulate deposition that is characteristic of pulsed-laser deposition (PLD). Several methods have been proposed to reduce the particulate deposition in PLD.1 So far, complete removal of particulates without sacrificing some of the advantages of PLD has not been possible.
© 1995 Optical Society of America
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