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Conferences > CLEO > 1995 > CPD > CPD9
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1995),
  • paper CPD9

Three Dimensional Integration of an 8×8 Array of Thin Film GaAs/AlGaAs Photodetectors with Vertical Electrical Interconnects to Underlying Silicon Circuitry

S. Fike, B. Buchanan, N.M. Jokerst, M.A. Brooke, T. Morris, and S. DeWeerth

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Abstract

This paper reports the three dimensional integration of an 8×8 array of individually addressable thin film GaAs based photodetectors with vertical electrical interconnects to underlying silicon circuitry. This array demonstrated a yield of 100%.

© 1995 Optical Society of America

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