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Conferences > CLEO > 1995 > CPD > CPD4
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1995),
  • paper CPD4

Ultralow threshold VCSELs fabricated by selective oxidation from all epitaxial structure

Gye Mo Yang, Michael H. MacDougal, and P. Daniel Dapkus

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Abstract

Vertical-cavity surface-emitting lasers (VCSEL's) fabricated by selective oxidation are attractive to achieve very low threshold currents. Oxidized Al(Ga)As has been used as a current aperture under a top distributed Bragg reflector (DBR) mirror rather than proton implantation or pillar etching. The low refractive index (~1.55) of the wet thermal oxide films has also motivated their use in high refractive index contrast multilayer mirrors.

© 1995 Optical Society of America

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