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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1994),
  • paper CTuV4

Laser-plasma droplet target for low-debris soft x-ray generation

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Abstract

The small size, short pulse, high brightness and high spatial stability' of the laser-produced plasma (LPP) makes it an attractive soft x-ray source for table-top microscopy and lithography. Unfortunately, conventional solid LPP targets produce significant amounts of debris which may destroy or coat components positioned close to the plasma. Increasing the distance between the source and the components reduces the problem but results in a low x-ray flux. We practically eliminate the debris by using small (10-20 μm) liquid droplets as target.1 Thus, the x-ray source can be positioned close to the x-ray components without risking damage. Furthermore, the LPP drop x- ray source has the advantage of providing fresh target drops for a full day of experiments, and provides nearly 4π steradians geometric access.

© 1994 Optical Society of America

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