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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1993),
  • paper CThI5

Long-pulse KrCl laser at 222 nm

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Abstract

Efforts to increase excimer lasers' pulse width and efficiency have been successful only for the XeCl laser.1,2 The efficiency of long-pulse KrF Laser (250 nm) is low, and for the other short wavelength excitner lasers ArCl (175 nm), ArF (193 nm), and KrCl (222 nm), only short optical pulses (10-30 ns) have been obtained to date.

© 1993 Optical Society of America

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