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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1992),
  • paper CTuD2

High-power narrow linewidih ArF laser

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Abstract

As a light source for microfabrication, we have been developing a high beam- quality (narrow linewidth, low beam divergence), high power ArF laser system. The system is an oscillator-amplifier injection-locking system, in which a combination of two etalons is used in the oscillator stage.

© 1992 Optical Society of America

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