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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1992),
  • paper CThJ2

Excimers in the processing of tribological thin films

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Abstract

Since a frequency-doubled YAG laser was first used to deposit MoS2 thin films in 1987,1 laser processing of tribological thin films has advanced significantly. Early films showed promise, but problems with low photon energies of 532-nm light prompted a change to the UV wave-lengths. In the past two years, excimer laser deposition of tribological thin films has grown from a laboratory novelty to a process of real technological importance.

© 1992 Optical Society of America

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