Abstract
We have micromachined on silicon a novel optical modulator that utilizes a reflection phase grating. Microbridges act as the grating with a grating height that is controlled by deforming the bridges electrostatically. This device has almost all the same advantages as Texas Instruments’ deformable mirror device1 but is capable of much faster switching speeds. The bandwidth of the modulation ranges from dc to a few MHz.
© 1992 Optical Society of America
PDF ArticleMore Like This
James M. Florence
WA1 Spatial Light Modulators and Applications (SLM) 1990
R. Gerhard-Multhaupt, W. Brinker, H. J. Ehrke, W. D. Molzow, C. Przyrembel, H. Roeder, W. Wirges, H. L. Fielder, and R. Melcher
CThC6 Conference on Lasers and Electro-Optics (CLEO:S&I) 1992
Carol Bibiana Rojas Hurtado, Johannes Dickmann, and Stefanie Kroker
ck_1_4 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2019