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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1992),
  • paper CThC5

Deformable grating optical modulator

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Abstract

We have micromachined on silicon a novel optical modulator that utilizes a reflection phase grating. Microbridges act as the grating with a grating height that is controlled by deforming the bridges electrostatically. This device has almost all the same advantages as Texas Instruments’ deformable mirror device1 but is capable of much faster switching speeds. The bandwidth of the modulation ranges from dc to a few MHz.

© 1992 Optical Society of America

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