Abstract
Coherently-coupled vertical cavity Surface Emitting Laser Arrays (SELAs) have been the subject of intense research lately because of their potential for emitting large output intensity.1-5 We demonstrate an 8x8 phase-coupled patterned grid Contact/mirror SELA (C-SELA). Another 8x8 Pixellated SELA (P-SELA) and a unitary 78μmx78μm broad area SEL (B-SEL) is also studied. The GaAs/AlGaAs top-emitting SEL structure is similar to those described in [6-7]. A deep H+implant was used for gain-guiding.6 The P-SELA, was processed by protecting the 8x8 matrix of individual 8μmx8μm SELs during the gain-guiding implant, resulting in an array of individual SELs separated by 2μm. For the C-SELA a 2μm-wide grid contact pattern overlaid the 78μmx78μm region protected during the gain-guide implant.
© 1992 Optical Society of America
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