Abstract
The performance of rare gas halogen (RGH) excimer lasers is strongly influenced by the purity and exact composition of the gas mixture. Although initial purity levels and rare gas/halogen concentration can be carefully optimized for best operation at the start of laser operation, internal gas degradation eventually limits the useful lifetime of a gas fill. Over recent years, significant improvements in the lifetime of a gas fill have been made.1 However, as rare gas costs increase due to limited supplies2 and continuous operation of excimer lasers become more common, gas lifetime remains a key issue in excimer laser reliability.
© 1990 Optical Society of America
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