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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1990),
  • paper CTHB5

Switchless discharge excimer system: modeling and large volume XeCl laser experimental results

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Abstract

A major problem in the development of a large volume (>5-liter) and high repetition rate (>100-Hz) excimer laser is the achievement of a reliable switch to transfer efficiently the energy stored in a pulse forming network into the laser discharge mixture. In fact, the commonly used thyratrons or spark gap are not good switch candidates for this purpose due either to a too high rate of discharge current rise (>1011 A/s) and transferable charge (>1G−2 C) or to a too high repetition rate.

© 1990 Optical Society of America

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