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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper WK2

Subangstrom sensitive techniques for determining surface roughness of high quality optical surfaces and thin films

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Abstract

Today optical surfaces can be made in production facilities with an rms roughness of <1 Å. Even window panes made by the float glass technique exhibit a surprisingly low roughness of 2–3 Å rms, measured over 0.5-mm lateral distance at 0.2-μm resolution. Not only optical surfaces but also surfaces of semiconductor wafers have improved tremendously over the last few years and may well be the best low scatter surfaces ever made.

© 1989 Optical Society of America

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