Abstract
We have developed a computer-based ArF laser kinetics model for e-beam pumped mixtures of Ar and F2. The code presently contains approximately fifty reactions and includes ArF*(B) and ArF*(C) state collisional mixing and a vibrational relaxation model for the upper laser level. The densities of fifteen species and the laser flux are calculated as functions of time and one spatial dimension (along the axis of the lasing medium). The numerical procedures used are based on the code developed by Czuchlewski and co-workers at LANL.1
© 1989 Optical Society of America
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