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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper WF12

Secondary emission electron gun for x-ray preionized discharge pumped XeCl lasers

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Abstract

Industrial application of lasers requires the average power in the kilowatt range. Such power is currently obtained with CO2 or YAG lasers but is still to be demonstrated for excimer lasers. X-ray preionized XeCl lasers can deliver a few Joules per pulse. Long burst operation (250 pulses at a prf of 1 kHz and an average power of 150 W) has already been demonstrated with a small discharge volume XeCl laser1 in which a secondary emission electron gun2 was used as the x-ray source. The same gun has been operated at a prf of 1 kHz for ~108 pulses without degradation.

© 1989 Optical Society of America

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