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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper TUB1

Precision figuring of optics by ion machining processes

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Abstract

Eastman Kodak has developed an ion machining capability for precisely correcting symmetric and asymmetric errors on polished optical surfaces. Kodak developed the plasma etching capability to fabricate large quantities of small aspheric optical components. Two methods of ion machining, ion plasma etch and ion beam machining, have been used to achieve final total surface figure accuracies of <0.020λ rms for diameters up to 100 mm.

© 1989 Optical Society of America

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