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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper THU4

Wavelength stabilization of a narrow linewidth KrF excimer laser

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Abstract

A narrow linewidth KrF laser with long term stability would be a promising light source for mi- crolithography.1

© 1989 Optical Society of America

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