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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper THD3

Laser-induced fluorescence and Langmuir probe studies of copper photoablation

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Abstract

Following the photoablation of copper metal targets with wavelengths of 193, 248, and 351 nm, laser-induced fluorescence (LIF) and Langmuir probe measurements have been made in the etch plume. The combination of these two techniques gives a relatively complete view of atom and ion behavior. First, Langmuir probe data give results for overall ion energy and density and electron temperature on a microsecond time scale.

© 1989 Optical Society of America

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