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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1989),
  • paper THD2

Ultraviolet excimer laser ablation of PMMA: characterization of incubation sites by Fourier transform IR and UV spectroscopy

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Abstract

The ablation of solids with UV excimer lasers presently receives considerable interest due to its proven microelectronic and surgical applications. However, while this process is already applied in industry and surgery, a detailed understanding of the ablation mechanism still remains a challenge.

© 1989 Optical Society of America

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