Abstract

Waveguide excimer lasers excited by microwave discharge have been shown capable of highpulse repetition rates without the need for fast flow of the laser gas. Pulse repetition rates as high as 8 kHz have been reported from a device using a hollow-bore waveguide 0.5 mm in diameter. In a small-bore waveguide device, the pulse repetition rate is thought to be limited by the rate of recombination of the halogen donor after excitation and the cooling rate of the active medium.

© 1988 Optical Society of America