High-repetition high-excitation solid-state HIREXS laser

T. KANABE; E. TANAKA; T. JITSUNO; M. NAKATSUKA; SADAO NAKAI; C. YAMANAKA

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1988),
paper TUM39

High-repetition high-excitation solid-state HIREXS laser

T. KANABE, E. TANAKA, T. JITSUNO, M. NAKATSUKA, SADAO NAKAI, and C. YAMANAKA

Conference on Lasers and Electro-Optics 1988

Anaheim, California United States
25–29 April 1988
ISBN: 1-55752-033-X

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Poster Session: 1 (TUM)

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T. KANABE, E. TANAKA, T. JITSUNO, M. NAKATSUKA, S. NAKAI, and C. YAMANAKA, "High-repetition high-excitation solid-state HIREXS laser," in Conference on Lasers and Electro-Optics, D. Pinnow and P. Moulton, eds., Vol. 7 of OSA Technical Digest (Optica Publishing Group, 1988), paper TUM39.

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Abstract

This paper deals with a zigzag optical path Nd:glass slab geometry laser¹ designed and developed for the use of soft x-ray generation for x-ray lithography.² Nd:glass was chosen instead of crystalline materials as the laser medium to obtain a high-pulse laser energy.

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