Abstract
The ablation of polymers by excimer lasers has aroused considerable attention, and much recent work has been directed toward investigating this phenomenon.1 One interesting aspect is the extent to which thermal degradation and photodegradation contribute to the etching process. To investigate this we studied the ablative etching of polyethylene-terephthalate (PET) with a TEA CO2 laser and compared the results with those for UV excimer lasers.
© 1988 Optical Society of America
PDF ArticleMore Like This
F. W. CROSS, R. K. AL-DHAHIR, P. E. DYER, and R. SRINIVASAN
THF4 Conference on Lasers and Electro-Optics (CLEO:S&I) 1988
S. KUPER and M. STUKE
THK5 Conference on Lasers and Electro-Optics (CLEO:S&I) 1988
D. L. SINGLETON and G. PARASKEVOPOULOS
CWL2 Conference on Lasers and Electro-Optics (CLEO:S&I) 1990