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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1988),
  • paper THI3

Origin of contaminants in metal films photochemically deposited from the metal hexacarbonyls

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Abstract

Understanding the nature of contaminants in photochemically deposited metallic films is of great importance to the implementation of this technology to microelectronic devices, since the properties of the films can be altered significantly by the presence of trace amounts of impurities. In the case of refractory metal films, detailed studies toward this end have been carried out by Gluck and co-workers with the metal hexacarbonyls.1

© 1988 Optical Society of America

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