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A major improvement in excimer laser component reliability has occurred in recent years.1,2 However, industrial markets also require significant improvements in such areas as gas lifetime and the cleaning intervals for cavity optics. We present data obtained for a commercial computer-controlled excimer laser (Lumonics HE-460A) operating on KrF at a stabilized power level of ~40 W at 150 Hz.
© 1986 Optical Society of America
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