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Compound semiconductor strained-layer superlattices

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Abstract

Strained-layer superlattices (SLS) are periodic structures composed of alternating thin layers of materials whose bulk lattice constants are significantly different. By making the layers thin, the interfacial strain can be accommodated entirely by elastic deformation, avoiding the generation of misfit dislocations, as suggested schematically in Fig. 1. For semiconductor device applications this capability frees one from the normal requirement of virtually perfect lattice match between substrate and all epitaxial layers, greatly increasing the range of alloy compositions available for high quality (nearly defect-free) materials. The effects of layer strain, quantum size, and modulation doping allow the tailoring of electronic and optical properties in novel ways that cannot be achieved in bulk, unstrained structures. Combined with the attractive metallurgical properties of the SLS, this tailorability of properties makes possible many novel, high performance electronic devices.

© 1986 Optical Society of America

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