Abstract

To improve the practical efficiency of eiectron-beam-pumped excimer lasers, it is necessary to improve the efficiency of the diode. The transmission of the hibachi structure can be made as high as 90%, and the intrinsic limit in conventional diodes is the transmittance of the anode and main foils. In most of the diodes, thin aluminum or titanium foil is used as the anode foil, and ~25-µm thick titanium foil is used as the main foil. The total transmittance of the foils is usually only 75% or less.

© 1985 Optical Society of America