Computerized noncontacting roughness measuring method for nonoptical surfaces

NOBUHIRO TSUDA

doi:10.1364/CLEO.1985.FD5

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1985),
paper FD5
•https://doi.org/10.1364/CLEO.1985.FD5

Computerized noncontacting roughness measuring method for nonoptical surfaces

NOBUHIRO TSUDA

Conference on Lasers and Electro-Optics 1985

Baltimore, Maryland United States
21–24 May 1985
ISBN:

From the session
Coherent Measurement Techniques (FD)

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N. TSUDA, "Computerized noncontacting roughness measuring method for nonoptical surfaces," in Conference on Lasers and Electro-Optics, A. Gara, C. Giuliano, D. Auston, and R. Jacobs, eds., OSA Technical Digest (Optica Publishing Group, 1985), paper FD5.

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Abstract

Interference fringes are useful for surface measurements.^1–5 Figure 1 shows a schematic of the contouring apparatus. Two coherent light beams (L₁, L₂) are focused to the same spot on the specimen surface. The two beams have an angular separation which determines a fringe spacing Δ₁ given by

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