The present contribution answers the question: for a given current density of an e-beam-pumped KrF laser what are the optimum system parameters, such as partial gas pressures and outcoupling? This problem has been investigated both experimentally and theoretically. Starting from a comprehensive set of kinetic reactions we found that a limited number of reactions determine the behavior of the system and that only some of them play a critical role in calculating the numerical values of the laser parameters.

© 1984 Optical Society of America

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