While providing useful sources of high-power UV radiation, discharge-pumped excimer lasers suffer from the disadvantage of having relatively low electrical efficiencies. A major contributory factor to this is the inefficient transfer of energy from the storage source into the laser plasma during the lasing period. Recent studies with an x-ray preionized XeCl laser (Fig. 1) have identified the impedance and inductance of the driving circuit as having a significant effect on the overall efficiency. The laser was of 0.91 active volume and produced pulses of energy up to 4.65 J and durations of 100-140 nsec.

© 1984 Optical Society of America

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