Abstract
This work describes the design and fabrication steps of a MEMS resonant-beam structure that utilizes optical trapping technology and microfluidics in an attempt to enhance the precision and accuracy of cellular-mass sensing devices.
© 2015 Optical Society of America
PDF Article | Presentation VideoMore Like This
Daquan Yang, Huiping Tian, and Yuefeng Ji
AS4I.5 Asia Communications and Photonics Conference (ACP) 2015
Gregory N. Nielson, Dilan Seneviratne, Francisco Lopez-Royo, Peter T. Rakich, Fabrizio Giacometti, Harry L. Tuller, and George Barbastathis
CTuFF5 Conference on Lasers and Electro-Optics (CLEO:S&I) 2004
Niels Quack, Hamed Sattari, Alain Y. Takabayashi, Yu Zhang, Pierre Edinger, Carlos Errando- Herranz, Kristinn B. Gylfason, Xiaojing Wang, Frank Niklaus, Moises A. Jezzini, How Yuan Hwang, Peter O’Brien, Marco A. G. Porcel, Cristina Lerma Arce, Saurav Kumar, Banafsheh Abasahl, Peter Verheyen, and Wim Bogaerts
M2D.3 Optical Fiber Communication Conference (OFC) 2019