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Conferences > BGPP > 2007 > JWA > JWA8

TIRE of 2D Binary Gratings with Combined Fe-SiO2 Dots

Jaromir Pistora, Jaroslav Vlcek, Michael Cada, and Montasir Qasymeh

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Abstract

Theoretical model for total internal reflection ellipsometry (TIRE) is used to testing of an influence of metallic elements in 2D grating structure. The influence of iron volume in the dots and protection metallic layers is analyzed in detail.

© 2007 Optical Society of America

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