Abstract
Influence of axial magnetic field on micromachining of silicon crystals by ultraviolet nanosecond laser pulses is orders-of-magnitude stronger than by near-infrared femtosecond pulses. It suggests substantial improvement of silicon micromachining by ultraviolet nanosecond laser pulses.
© 2020 The Author(s)
PDF ArticleMore Like This
Hamid Farrokhi, Vitaly Gruzdev, Hongyu Zheng, and Wei Zhou
STh1J.2 CLEO: Science and Innovations (CLEO:S&I) 2017
S. A. Romashevskiy
JW6B.14 Frontiers in Optics (FiO) 2020
S. A. Romashevskiy and S. I. Ashitkov
JM6A.11 Frontiers in Optics (FiO) 2020