Deformable mirrors made using MEMS processes have become commodity products. New capabilities include nanometer-scale predictive open-loop control and scaling to >4000 actuators, while maintaining exceptionally low size, weight, and power.

© 2009 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription