Mass Production of Optoelectronic Devices for Solid State Lighting (SSL) by MOCVD

Michael Heuken

doi:10.1364/AOE.2008.SaO1

Asia Optical Fiber Communication and Optoelectronic Exposition and Conference
OSA Technical Digest (CD) (Optica Publishing Group, 2008),
paper SaO1
•https://doi.org/10.1364/AOE.2008.SaO1

Mass Production of Optoelectronic Devices for Solid State Lighting (SSL) by MOCVD

Michael Heuken

Asia Optical Fiber Communication and Optoelectronic Exposition and Conference 2008

Shanghai China
30 October–2 November 2008
ISBN: 978-1-55752-863-6

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Solid-State Lighting (SaO)

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M. Heuken, "Mass Production of Optoelectronic Devices for Solid State Lighting (SSL) by MOCVD," in Asia Optical Fiber Communication and Optoelectronic Exposition and Conference, OSA Technical Digest (CD) (Optica Publishing Group, 2008), paper SaO1.

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Abstract

The advances in the optoelectronic market for SSL constantly demand a reduction of the production cost of devices. The Cost of Ownership of the MOCVD production tool is one of the key parameters. We addressed this issue by developing two new reactor configurations for the AIX2800G4 HT Planetary Reactor^® (11×4 inch) and CRIUS^® Close-Coupled-Showerhead (CCS) (12×3 inch) platforms.

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