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Conferences > AOE > 2008 > SaK > SaK36
  • Asia Optical Fiber Communication and Optoelectronic Exposition and Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper SaK36
  • •https://doi.org/10.1364/AOE.2008.SaK36

Finite Element Analysis of MEMS Based Fabry-Perot Optical Filter with Electrostatic Actuation

Lei Wei and Xuyuan Chen

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Abstract

Mechanical properties and tuning ability of MEMS based Fabry-Perot optical filter with electrostatic actuation are investigated. The simulation results demonstrate that the fringing field influence should be taken into account in structure design and modeling.

© 2008 Optical Society of America

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