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Conferences > AIOM > 2009 > AWB > AWB2
  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper AWB2
  • •https://doi.org/10.1364/AIOM.2009.AWB2

Progress on the Fabrication of On-Chip, Integrated Chalcogenide Glass (ChG)-based Sensors

Laeticia Petit, Nathan Carlie, Bodgan Zdyrko, Igor Luzinov, Kathleen Richardson, Juejun Hu, Anu Agarwal, Lionel Kimerling, Troy Anderson, and Martin Richardson

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Abstract

This paper reviews ongoing progress on the material design, fabrication and performance of high-Q chalcogenide glass resonators utilizing cavity-enhancement for high sensitivity MIR chemical sensing. These structures have been fabricated in thermally evaporated As- and Ge-based chalcogenide glass films with PDMS (polydimethylsiloxane) micro-fluidic channels using standard UV lithography. Discussed are findings that demonstrate that our novel chalcogenide-based micro-fluidic device can be used as highly sensitive refractive index sensors.

© 2009 Optical Society of America

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