Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > AIOM > 2009 > AThB > AThB3
  • Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper AThB3
  • •https://doi.org/10.1364/AIOM.2009.AThB3

Selected Applications of Atomic Layer Deposition Dielectric Nanolaminates as Functional Optical Coatings

Adriana Szeghalmi, Michael Helgert, Robert Brunner, Mario Bretschneider, Stephan Senz, Ulrich Gösele, and Mato Knez

Not Accessible

Your library or personal account may give you access

Abstract

The paper discusses optical applications of atomic layer deposition. X-ray mirrors, antireflective coatings and bandpass filters were made for the visible spectral region. Coatings applied to two-dimensional shallow gratings produced tunable guided mode resonance filters.

© 2009 Optical Society of America

PDF Article
More Like This
Atomic Layer Deposition-an alternative to the deposition of optical coatings?

Mikko Ritala and Markku Leskelä
MB1 Optical Interference Coatings (OIC) 2004

Conformal optical coatings on complex 3D-macrostructures using atomic layer deposition

John Rönn, Mikko Konttinen, Kalle Niiranen, Mikael Saarniheimo, and Sami Sneck
TC.4 Optical Interference Coatings (OIC) 2022

Atomic layer deposition of magnesium fluoride for optical application

Yuma Sugai, Toshihiko Sato, Hironori Sugata, Yohei Sakano, Satoshi Okuyama, Takuya Sugawara, Muhammad Safdar, Jani Hämäläinen, and Tommi Suni
TC.5 Optical Interference Coatings (OIC) 2022

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use