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Optical Diffraction based single image method to obtain nanometer resolution deflection profiles in Micro-cantilever based sensors

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Abstract

Profiling of Micro-cantilever (MC) based sensor bending due to molecular recognition induced surface stress changes by OBD method requires multiple measurements along the length of the microstructure. A single image Optical Diffraction based profiling method is proposed employing a double micro-cantilever structure achieving deflection resolutions of 1nm and surface stress changes of 50µN/m in a typical MC.

© 2010 Optical Society of America

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