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Optica Publishing Group
  • Asia Communications and Photonics Conference/International Conference on Information Photonics and Optical Communications 2020 (ACP/IPOC)
  • OSA Technical Digest (Optica Publishing Group, 2020),
  • paper T4D.1
  • https://doi.org/10.1364/ACPC.2020.T4D.1

Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits

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Abstract

Recent advances in silicon nitride integrated photonics have achieved ultralow optical losses. Transferring this technology to standard commercial foundries, and merging it with silicon photonics via heterogeneous integration, will seed novel laser and quantum applications.

© 2020 The Author(s)

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