New concept of silicon photonic MEMS switch based on total internal reflection

Yi Sun; Daoxin Dai

doi:10.1364/ACPC.2020.T1D.4

Asia Communications and Photonics Conference/International Conference on Information Photonics and Optical Communications 2020 (ACP/IPOC)
OSA Technical Digest (Optica Publishing Group, 2020),
paper T1D.4
•https://doi.org/10.1364/ACPC.2020.T1D.4

New concept of silicon photonic MEMS switch based on total internal reflection

Yi Sun and Daoxin Dai

Asia Communications and Photonics Conference 2020

Beijing China
24–27 October 2020
ISBN: 978-1-943580-82-8

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Photonic Integrated Devices (T1D)

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Y. Sun and D. Dai, "New concept of silicon photonic MEMS switch based on total internal reflection," in Asia Communications and Photonics Conference/International Conference on Information Photonics and Optical Communications 2020 (ACP/IPOC), K. Xu, D. Simeonidou, C. Chang-Hasnain, N. Wada, X. Ren, Z. Zhukov, P. Perry Shum, Y. Ji, J. Zhang, X. Zhou, C. Lu, and L. Wosinska, eds., OSA Technical Digest (Optica Publishing Group, 2020), paper T1D.4.

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Abstract

A novel silicon photonic MEMS switch based on total internal reflection (TIR) is proposed for the first time. The key element is a multimode interference (MMI) waveguide crossing with a switchable gap. This photonic switch works very well with a low excess loss of ~0.2 dB and a high extinction ratio of >23 dB in an ultra-broad wavelength range of 1250-1650 nm in the OFF state. The excess loss is still as low as 0.18 dB and the extinction ratio is as high as 58 dB in the ON state.

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