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  • Asia Communications and Photonics Conference (ACPC) 2019
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper M4A.232

Monolithic Integrated Balanced Photodiodes with Improved Electrical Isolation

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Abstract

Electrical isolation problem in monolithic integrated balanced photodiodes is investigated. Dry-etching induced damage caused an excess shunt leakage current of 2.5 mA, which has been suppressed by a combined dry and wet etching process.

© 2019 The Author(s)

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