Integrating periodically CL-TWE MZI electro-optic modulator based on InP-MQW optical waveguides

Guang Qian; Bin Niu; Wu Zhao; Xiao-Wen Gu; Feng-Jie Zhou; Guan-Yu Li; Yue-Chan Kong; Tang-Sheng Chen

Asia Communications and Photonics Conference (ACP) 2018
OSA Technical Digest (Optica Publishing Group, 2018),
paper Su2A.243

Integrating periodically CL-TWE MZI electro-optic modulator based on InP-MQW optical waveguides

Guang Qian, Bin Niu, Wu Zhao, Xiao-Wen Gu, Feng-Jie Zhou, Guan-Yu Li, Yue-Chan Kong, and Tang-Sheng Chen

Asia Communications and Photonics Conference 2018

Hangzhou China
26–29 October 2018
ISBN: 978-1-5386-6158-1

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Poster Session (Su2A)

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G. Qian, B. Niu, W. Zhao, X. Gu, F. Zhou, G. Li, Y. Kong, and T. Chen, "Integrating periodically CL-TWE MZI electro-optic modulator based on InP-MQW optical waveguides," in Asia Communications and Photonics Conference (ACP) 2018, OSA Technical Digest (Optica Publishing Group, 2018), paper Su2A.243.

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Abstract

In this paper, we reported the design, fabrication and preliminary measurements of an integrating periodically capacitive-loaded travelling wave electrode (CL-TWE) Mach-Zehnder interferometer (MZI) modulator based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration includes an optical MZI, a DC electrode, two phase electrodes, a U-electrode and an I-electrode. It was fabricated by standard photolithography, ICP dry etching, electroplating and etc. Measurement results show that the EO modulator has a propagation loss of about 9.4 dB/cm and an electric bandwidth of larger than 40 GHz.

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