An air-holes perforated waveguide (AHW) biochemical sensor was developed for affinity sensing. The AHW sensor is based on a multi-mode interferometer (MMI) with periodical air-holes on the top sensing area that can be miniaturized to several hundreds of µm. Simulation using an FDTD method proved that the AHW sensor has at least 7 times higher sensitivity compared to the conventional MMI without air-holes as one of the waveguides affinity sensors. The AHW sensor fabricated with silicon nitride was confirmed to propagate light by detection of output signals.
© 2017 Optical Society of AmericaPDF Article