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Conferences > ACPC > 2017 > M1F > M1F.1

Robust CMOS compatible photonic crystal nanocavity and DEMUX filter

Takasumi Tanabe, Yuta Ooka, Nurul Ashikin Binti Daud, and Tomohiro Tetsumoto

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Abstract

We photolithographically fabricate a high-Q photonic-crystal nanocavity with a silicon dioxide clad structure and demonstrate an electro-optic modulator, a photoreceiver, and a DEMUX, all of which are easy to integrate with other silicon photonic devices.

© 2017 Optical Society of America

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